High-purity gas diaphragm valve "High-temperature (250℃) compatible valve"
Achieving high performance, compactness, and low cost! Ideal for organic metal-based semiconductor processes that require uniform heat distribution.
The "high-temperature (250℃) compatible valve" can be used at 250℃ by making all valve components fully metallic. Thanks to its unique design, it minimizes the drop in Cv value in high-temperature environments, achieving high performance, compactness, and low cost. Additionally, not only the gas-contacting parts but all components of the valve, including the actuator, can be used in high-temperature environments, making it suitable for processes that require uniform heat distribution in organometallic systems. 【Features】 ■ All valve components are fully metallic, allowing use at 250℃ ■ Minimizes the drop in Cv value, achieving high performance, compactness, and low cost ■ All components of the valve, including the actuator, can be used in high-temperature environments ■ Suitable for processes that require uniform heat distribution in organometallic systems *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
basic information
【Product Material】 ■Body: SUS316L ■Seat: Metal (Body Material) ■Diaphragm: Cobalt Alloy *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Application】 ■Processes involving organometallic systems that require uniform heat distribution *For more details, please refer to the PDF document or feel free to contact us.
