Pressure vacuum valve
The "SBB Series" high-purity gas bellows valve now includes a vacuum KF flange connection type in its lineup!
This product is a bellows valve with a KF flange connection type for vacuum use. Leveraging our features of offering a lineup of various valves for high-purity gases and vacuum applications, we can accommodate a wide range from pressurization to vacuum by integrating technology and know-how. It can be used for gas introduction lines for pressure testing in exhaust systems of atmospheric processes such as CVD in semiconductor manufacturing. 【Features】 ■ KF flange connection type for vacuum use ■ Suitable as a leak valve for exhaust system testing for large chambers ■ Capable of accommodating a wide range from pressurization to vacuum *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Specifications (Excerpt)】 ■Body Size: 10A ■Flange Size: NW16 ■Cv Value: 2.1 ■Operating Pressure Range: VAC to 0.98MPa (G) ■Fluid Temperature Range: -10 to 100℃ ■Ambient Temperature Range: -10 to 60℃ *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Usage】 ■ For gas introduction lines for pressure testing of exhaust systems in processes such as CVD at atmospheric pressure ■ For reducing leak time in leak valve chambers for large chambers such as OLED FPD *For more details, please refer to the PDF document or feel free to contact us.
