Case Study: Valves usable in high-temperature ALD processes *Currently available for free.
"Complete Case Collection of Flow Paths" - Presenting examples of diaphragm valves made with PFA resin sheets that can be used in high-temperature environments up to 200°C for the entire valve.
Do you have any concerns such as wanting to heat the entire valve, needing a valve that can be placed in a constant temperature bath with the handle attached, or wanting a valve that ensures stable and reproducible gas flow? At KITZ SCT, we offer various solutions for fluid-related issues in semiconductor manufacturing. If you have any specific cases you are interested in, please contact us via Ipros or through our website. Website: https://www.kitzsct.com/contact/product/?utm_source=Ipros&utm_medium=web&utm_campaign=Arbooth
basic information
- This is a valve with excellent heat resistance, corrosion resistance, and durability. - Due to the low variation in Cv value during use, stable and reproducible gas flow can be achieved, allowing for the use of materials with low vapor pressure. - The heat-resistant valve handle allows the use of a constant temperature bath while the handle is attached.
Price information
It varies depending on the product specifications. For more details, please contact us through our website.
Delivery Time
Applications/Examples of results
Applications - For those who need valves that can be used in high-temperature environments - For those who need highly durable valves - Processes that use constant temperature baths - Processes that handle materials with low vapor pressure
