High-temperature compatible diaphragm valve with detachable PFA sheet section.
High-purity gas valves suitable for material containers and semiconductor manufacturing processes. The seat can be detached and replaced, and it can be used in high-temperature environments up to 250 degrees.
The high-purity gas valve series "ZD Series" and "ZD-K Series" (high-temperature replaceable valves) are diaphragm valves that allow for the detachable and replaceable exchange of the seat section and can be used in high-temperature environments. 【Features】 ■ Customers can replace the valve seat themselves! The seat section can be detached and replaced during valve cleaning, allowing for the reuse of the valve. This makes it suitable for applications where valves need to be cleaned or replaced, such as for material containers. *Note: After maintenance, the product warranty will be void. ■ Usable in high-temperature environments! Both the interior through which the fluid flows and the exterior are resistant to high-temperature environments. The "ZD Series" can be used in environments up to 200°C, while the "ZD-K Series" can be used in environments up to 250°C. ■ Improved durability through the adoption of PFA seats By changing from metal seats to PFA seats, durability performance is improved by approximately 16 times.* *Based on our performance comparison data. *Metal seat: 50,000 cycles, ZD-K Series PFA seat: 800,000 cycles. We offer various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■Size: 1/4" 1/2" ■Drive Method: Automatic Manual (only for ZD-K) 【Product Material】 ■Body: SUS316L, SUS316LE (dual melted material) ■Seat: PFA ■Diaphragm: Cobalt alloy *For more details, please refer to the PDF document or feel free to contact us.
Price information
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Delivery Time
Applications/Examples of results
【Usage】 ■ High purity material container * Cleanable: Please refer to this if you have been using disposable material containers. ■ Baking at high temperatures For drying after valve cleaning or high-temperature processes during solid material supply, etc. * For more details, please refer to the PDF document or feel free to contact us.
