Proposal for Challenges of High-Temperature Conditions in Solid Material Supply: Case Study Collection *Currently Available for Free*
A must-see for semiconductor material manufacturers! We are presenting examples of proposals addressing the challenges of high-temperature conditions in solid material supply.
We are using all-metal valves in a supply process at 250℃, but we are dissatisfied with their durability. In a supply process at 200℃, we are using valves that cannot have their seats replaced, which means we have to replace the valves, leading to increased running costs. We are using valves rated for 200℃, but the drive components cannot withstand high temperatures, so we are only heating the body. The heat from the heater mounted on the body is dissipating from the drive side, and we are struggling with this issue... Do you have similar concerns? KITZ SCT offers comprehensive solutions for flow path issues. If you have any specific cases you are interested in, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product
basic information
- This is a diaphragm valve with a replaceable seat section. - Even if it is welded to the material container (canister), the seat section can be replaced, allowing for reduced running costs. - It can supply materials stably with minimal temperature fluctuations even in high-temperature environments of 200°C/250°C.
Price information
It varies depending on the product specifications. For more details, please contact us through our website.
Delivery Time
Applications/Examples of results
Usage - Those who handle raw materials used in CVD equipment and similar applications - Those who are replacing raw material containers (canisters) and valves with each cleaning, leading to increased running costs - Those who want to supply solid materials at high temperatures but are struggling with unstable fluid temperatures
