Quartz Glass Products and Processed Quartz Glass Products 'Active in semiconductor manufacturing processes'

Our group companies manufacture quartz glass products. We have many delivery records to domestic and overseas semiconductor device manufacturers and silicon manufacturers.

last updated May 15, 2026

Heat-resistant Glass Fiber (Siliglas) “High-temperature heat resistance”

Capable of handling long hours of continuous use even at temperatures as high as 1000 degrees C. Heat-resistant glass fiber "Siliglas"

last updated May 15, 2026

Surface Modification Treatment Processing and Jig Cleaning (TOMCO)

Maintenance of jigs and parts is from quality maintenance and improvement. Our thermal spraying and cleaning technology reproduces high quality without damaging the base material.

last updated May 15, 2026

Atmospheric Pressure CVD (APCVD) System for Small-scale Production and Development (D501)

For prototyping, development, and small lot production For deposition of NSG(SiO2)/BSG/PSG/BPSG Batch processing (simultaneous processing of multiple substrates) APCVD system

last updated May 15, 2026

High-performance Single-wafer Processing Atmospheric Pressure CVD (APCVD) System (A200V)

Small quantities and wide varieties. NSG(SiO2)/PSG/BPSG deposition. Single-wafer processing atmospheric pressure CVD (APCVD) system (Compatible with 8-inch SiC wafers)

last updated May 15, 2026

Continuous Atmospheric Pressure CVD System for solar cell mass production (AMAX1000S)

For mass production of crystalline Si solar cells/For NSG(SiO2)/PSG/BSG deposition High productivity/Continuous atmospheric pressure CVD (APCVD) system

last updated May 15, 2026

High-productivity Continuous Atmospheric Pressure CVD (APCVD) System (AMAX800V)

Mass Production / NSG(SiO2)/PSG/BPSG deposition　 High-productivity/Continuous atmospheric pressure CVD (APCVD) system (for up to 8-inch wafers)

last updated May 15, 2026

High-productivity Continuous Atmospheric Pressure CVD (APCVD) System (AMAX1200)

Mass production / NSG(SiO2)/PSG/BPSG deposition High-productivity / Continuous atmospheric pressure CVD (APCVD) system (for 12-inch wafers)

last updated May 15, 2026

Glass Substrate Deposition System “Low Temperature Deposition” “Flexible Substrate Support”

4.5 generation glass substrate deposition system for rigid/flexible devices such as FPD.

last updated May 15, 2026

Spin Type Cleaning System WULF series for high definition photomasks

Equipped with a spin cleaning unit that uses tap water. This method utilizes a cleaning solution that replaces the RCA cleaning solution.

last updated May 15, 2026

IPA Vapor Drying System

IPA vapor displaces moisture and dries the object. For 4 to 8-inch wafers. Can be installed into and docked to various cleaning tools.

last updated May 15, 2026

Wafer Transport and Transfer System “Pitch Conversion” and “Face to Face Transfer”

Automatic transfer of wafers in a cassette to another cassette/Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer.

last updated May 15, 2026

Quartz Tube Cleaning System (HTC/VTC series) “Contributing to the reduction of chemical solution and pure water”

Vertical cleaning system (VTC series) saves space and contributes to the "reduction of chemical solution and pure water". World's top-class delivery record (over 400 units)

last updated May 15, 2026

Glass-like Carbon “Carbon material with excellent chemical and corrosion resistance”

Glass-like Carbon is a type of carbon material with a proven track record for use in semiconductor manufacturing system components. High purity is also possible.

last updated May 15, 2026

Carbon Adhesive “high-strength, heat-resistant adhesive for carbon materials”

High-strength, heat-resistant adhesive for carbon materials. Adhesion is possible without impairing the excellent properties of carbon materials.

last updated May 15, 2026

Molybdenum Disilicide (MoSi2) Heaters “Up to 1800 degrees C usable!”

Molybdenum Disilicide Heaters: Repeatable, and long-life, customized design is possible

last updated May 15, 2026

Thermocouple for High-temperature Furnace (for semiconductor manufacturing system)

Highly accurate temperature measurement function is ideal for temperature control of heat treatment process!

last updated May 15, 2026

Silicon Wafer Polishing Carrier “quick delivery and small lot production is available”

We manufacture carriers according to customer needs for use as wafer holders in the lapping and polishing process of silicon wafer manufacturing.

last updated May 15, 2026

Glass-like Carbon Coat “Technology to form a coating layer”

Glass-like carbon coating is a technology that forms a coating layer of glass-like carbon by heating up graphite material coated with a proprietary resin.

last updated May 15, 2026

Repair of Electronic and Industrial Devices for semiconductor manufacturing system

Significant cost advantages over purchasing products by identifying the repair parts and replacing them. Repair of discontinued parts is also available.

last updated May 15, 2026

Precision Machined Parts (TOMCO) “reliable machining technology and quick delivery”

We support our customer's development of superior products with our proven processing technology and quick delivery.

last updated May 15, 2026

PVA sponge roll - Excellent water absorption, chemical resistance, and filtration properties.

Glass and printed circuit board semiconductor manufacturing process field: PVA sponge roll boasting excellent water absorption, chemical resistance, and filtration properties.

last updated May 15, 2026

Appearance Inspection AI 'NuLMiL'

An AI that memorizes defective samples as they are! Automating visual inspections based on inspection standards.

last updated May 08, 2026

NuLMiL for Automobiles: Scratch Detection AI

Learn directly from defective samples! Automating scratch detection in automotive parts.

last updated May 08, 2026

NuLMiL for electronic components

An AI that learns directly from defective samples! Automating foreign matter contamination inspection.

last updated May 08, 2026

NuLMiL for Food: Shape Inspection AI

Learn directly from defective samples! Automating the inspection of food shapes.

last updated May 08, 2026

[For Pharmaceuticals] NuLMiL: Automating Packaging Quality Control

An AI that learns from defective samples to streamline visual inspection of pharmaceutical packaging.

last updated May 08, 2026

NuLMiL for Metalworking

An AI that learns directly from defective samples! Automating visual inspection of metal surfaces.

last updated May 08, 2026

NuLMiL for Plastic Products

An AI that learns directly from defective samples! Automating visual inspection.

last updated May 08, 2026

NuLMiL for Ceramics

An AI that learns directly from defective samples! Automating crack inspection of ceramic products.

last updated May 08, 2026