Japan Fluorine Industry Semiconductor Manufacturing Equipment
Wet cleaning device
High-purity fluoropolymer coatings prevent contamination of devices due to the leaching of metal ions.
basic information
【Features】 ○ Reduced adhesion of surface contaminants ○ Difficult to generate particles ○ Decreased damage to the edges of Si wafers ○ Prevention of external contamination due to chemical permeation ○ Increased strength due to the possibility of using metal tanks ○ Improved thermal conductivity efficiency ○ Prevention of external contamination due to chemical permeation ○ Increased strength due to the possibility of using metal tanks ○ Improved thermal conductivity efficiency ● For more details, please contact us or refer to the catalog.
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Our company is an organization that quickly obtained ISO 9001 and 14001, complying with international standards in the industry (fluororesin-related). We are also a technology-leading company that is constantly developing new products.