NIPPON FUSSO CO.,LTD. Official site

Fluororesin coating and lining for quartz.

We will solve the problems of quartz substrate particles and corrosion!

Applying a fluororesin coating or lining to quartz is expected to provide the following benefits: 1. Cost reduction: Protecting the product from chemical solutions is expected to extend the lifespan of the quartz substrate. 2. Particle prevention: Eliminating wear on quartz due to wafer contact is expected to have a particle prevention effect. 3. Prevention of quartz and wafer damage: Due to its soft material, it is expected to prevent damage caused by contact between quartz and wafers. 4. Improved liquid drainage: High water repellency is expected to reduce the residue of chemical solutions, leading to reduced cleaning costs, and the cleaning solution is less likely to get dirty, further contributing to cost reduction. 5. Enhanced high purity: Preventing the generation of metal ions from the quartz substrate is expected to improve high purity.

Related Link - https://www.nipponfusso.co.jp/solution/industry/se…

basic information

Nippon Fluorine Industry Co., Ltd. provides fluororesin coating and lining on quartz substrates. With over 25 years of extensive experience in coating quartz, our coatings are used in various applications, including preventing particle contamination due to wafer contact and preventing substrate corrosion from chemicals. If you have concerns about particle or corrosion issues, please feel free to consult us.

Price information

Please consult with us.

Delivery Time

OTHER

Please consult with us.

Applications/Examples of results

"Quartz guide lifter," "quartz chuck," etc. for batch-type cleaning equipment.

Recommended products

Distributors

Our company is an organization that quickly obtained ISO 9001 and 14001, complying with international standards in the industry (fluororesin-related). We are also a technology-leading company that is constantly developing new products.