Ultra High Purity Gas Pressure Regulator "S-TORRV02 Series"
Designable small outlet panels! A pressure regulator suitable for integration into devices.
The "S-TORRV02 series" is a very compact pressure regulator with a body diameter of φ35 and a standard distance between faces of 70.5mm. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. All units undergo shipping inspections, including helium leak tests. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with the gas. 【Features】 ■ Compact model ■ The connection between the body and fittings is welded, and a metal seal structure is adopted for the external seal of the diaphragm section ■ High external sealing capability allows for safe use, especially with high-purity gases ■ Design of a compact outlet panel is possible ■ Suitable for integration into equipment *For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Other Features】 - Developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines. - Eliminated the threaded structure in the gas contact area and applied electropolishing as standard. - Achieved very high moisture replacement characteristics and reduced particles. - Conducted shipping inspections on all units, including He leak tests. - A very compact pressure regulator with a body diameter of φ35 and a standard face-to-face distance of 70.5mm. - Available "SH series" using a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in gas contact. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
