Pressure regulator for semiconductor gas
Pressure regulator for semiconductor gas
It is a high-end pressure regulator suitable for the supply of semiconductor material gases.
1～26 item / All 26 items
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Ultra High Purity Gas Pressure Regulator "S-TORRV02 Series"
Designable small outlet panels! A pressure regulator suitable for integration into devices.
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Ultra-high purity gas pressure regulator "S-TORRV30/30SH Series"
Eliminate the screw structure of the gas connection part! Achieve very high moisture replacement characteristics and particle reduction!
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Ultra-high purity gas pressure regulator "S-TORRV50/50SH Series"
A filter is built into the flow path of the single chamber! You can use it with confidence, especially with high-purity gases.
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Ultra-high purity gas pressure regulator "S-TORRV1300 Series"
Elimination of the screw structure in the gas connection section! Ultra-high purity gas pressure regulators with 100% inspection conducted on all units before shipment.
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Ultra-high purity gas pressure regulator "S-TORRV2300 Series"
High flow model for primary side high pressure! Widely used in primary pressure reduction equipment.
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Ultra-high purity gas pressure regulator 'S-TORRV2300SH/AH'
Developed based on the TORR regulator! A helium leak test is conducted on all units as part of the shipping inspection!
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Ultra High Purity Gas Pressure Regulator "S-TORRVA10 Series"
Negative pressure control, suitable for low vapor pressure models! Built-in filter in the flow path of the primary chamber to reduce internal leakage.
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Ultra-high purity gas pressure regulator "S-TORRVT50 Series"
Conducting shipment inspections on all units! Introduction of the Tide diaphragm-type ultra-high purity gas pressure regulator.
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Ziboran Dedicated Pressure Regulator 'S-TORRV1900 Series'
Elimination of the screw structure in the gas connection section! A pressure regulator specifically designed for diborane that achieves particle reduction.
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High Purity Gas Pressure Regulator "TORR-30 Series"
A pressure regulator with a built-in filter in the flow path of the first chamber! Widely usable for equipment after pressure reduction.
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High Purity Gas Pressure Regulator "TORR-50/80 Series"
Production of electro-polished specifications is also possible! A pressure regulator that can be called the "symbol of semiconductor gas pressure regulators."
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High Purity Gas Pressure Regulator "TORR-150 Series"
Medium flow model for low pressure on the primary side! Assembly is carried out in a clean room with a class 1000 level of 0.3μm for all units!
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High Purity Gas Pressure Regulator "TORR-350 Series"
A high-flow model for low pressure on the primary side! A pressure regulator that can be called the "symbol of pressure regulators for semiconductor gases."
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High Purity Gas Pressure Regulator "TORR-800 Series"
The epitome of pressure regulators for semiconductor gases! A helium leak test is conducted on all units during the shipping inspection!
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High Purity Gas Pressure Regulator "TORR-1300 Series"
Standard model for primary side high pressure! Pressure regulator for high purity gas, also available in electropolished specifications.
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High Purity Gas Pressure Regulator "TORR-2300 Series"
Reduce the occurrence of internal leaks! Usable in primary pressure reduction equipment for liquefied gases with high steam pressure.
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High Purity Gas Pressure Regulator "TORR-2500 Series"
Conducting shipping inspections on all units! A filter is built into the flow path of the primary chamber to reduce internal leaks!
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Pressure Regulator "TORR-3300 Series"
Custom production according to your specifications! Including He leak tests, we conduct inspections on all units before shipment.
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Pressure Regulator "TORR-2800/2800SH Series"
A large flow model for liquefied gas and corrosive gas with a built-in filter in the flow path of the first chamber.
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Pressure Regulator "TORR-H Series"
Production of electropolished products is also possible! Including He leak tests, we conduct shipping inspections on all items.
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Pressure Regulator "TORR-L Series"
All shipments undergo inspection! Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units.
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Peripheral equipment for ultra-high purity gas: "Pressure Gauge"
Used with S-TORR and TORR adjusters! Manufactured under strict quality control in a clean environment.
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Pressure Switch "TPS Series"
A pressure switch that can change the set pressure, is lightweight and compact, and easy to handle.
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Selection Guide "Guide to Selecting Pressure Regulators"
It's easy to find a pressure regulator that suits your needs! Basic knowledge such as unit conversions and terminology explanations is also included.
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Introduction to the automatic pipe welding machine and peripheral equipment manufactured by Orbitalum in Germany.
Recommended for high-purity piping contractors, including semiconductor factories! *Exhibiting at SEMICON Japan 2024! We will showcase and demonstrate new products.
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[Exhibition Participation] Streamline Pipe Welding! Introduction of Automatic Pipe Welding Machines and Pressure Regulators
Recommended for high-purity piping contractors, including semiconductor factories! *Exhibiting at SEMICON Japan 2025! We will showcase and demonstrate new products.
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