High Purity Gas Pressure Regulator "TORR-1300 Series"
Standard model for primary side high pressure! Pressure regulator for high purity gas, also available in electropolished specifications.
The "TORR-1300 Series" is a pressure regulator that is synonymous with "pressure regulators for semiconductor gas," having earned high trust due to its long track record. It incorporates a filter in the flow path of the primary chamber to reduce internal leakage. Assembly is conducted in a clean room with a class 1000 standard for all units. It is widely used as a standard model for primary pressure reduction equipment such as cylinder cabinets. 【Features】 ■ Standard model for high pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard for all units ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leakage ■ Conducts shipping inspections, including He leak tests, for all units ■ Custom manufacturing of electropolished products is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Performance】 ■ Maximum operating pressure on the inlet side: 15MPa ■ Maximum operating pressure on the outlet side: 1.0MPa ■ Maximum flow rate: 550L/min (nor) (P1=10MPa, P2=1.0MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 1.3kg (4 ports) ■ Built-in filter filtration degree: 5μm ■ Inlet and outlet port diameter: 1/4" ■ External leakage amount ・Less than 1.3×10^-9Pa·m3/sec (threaded connection) ・Less than 1.3×10^-10Pa·m3/sec (welded connection) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
