High Purity Gas Pressure Regulator "TORR-1300 Series"
Standard model for primary side high pressure! Pressure regulator for high purity gas, also available in electropolished specifications.
The "TORR-1300 Series" is a pressure regulator that is synonymous with "pressure regulators for semiconductor gas," having earned high trust due to its long track record. It incorporates a filter in the flow path of the primary chamber to reduce internal leakage. Assembly is conducted in a clean room with a class 1000 standard for all units. It is widely used as a standard model for primary pressure reduction equipment such as cylinder cabinets. 【Features】 ■ Standard model for high pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard for all units ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leakage ■ Conducts shipping inspections, including He leak tests, for all units ■ Custom manufacturing of electropolished products is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Performance】 ■ Maximum operating pressure on the inlet side: 15MPa ■ Maximum operating pressure on the outlet side: 1.0MPa ■ Maximum flow rate: 550L/min (nor) (P1=10MPa, P2=1.0MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 1.3kg (4 ports) ■ Built-in filter filtration degree: 5μm ■ Inlet and outlet port diameter: 1/4" ■ External leakage amount ・Less than 1.3×10^-9Pa·m3/sec (threaded connection) ・Less than 1.3×10^-10Pa·m3/sec (welded connection) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.