Ultra-high purity gas pressure regulator "S-TORRVT50 Series"

Conducting shipment inspections on all units! Introduction of the Tide diaphragm-type ultra-high purity gas pressure regulator.

The "S-TORRVT50 series" is a pressure regulator designed for ultra-high purity gases, featuring a structure that is robust for the supply of liquefied gases, utilizing a tide diaphragm system. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. The removal of springs from the gas contact area reduces the risk of particle generation. By providing heated supply, it can accommodate gases with a vapor pressure of 1.0 MPa or higher, with a maximum operating pressure of 2.5 MPa. 【Features】 ■ Tide diaphragm type for liquefied gases ■ Developed based on the TORR regulator ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leak occurrences ■ Conducts a complete inspection, including He leak tests, for all units shipped *For more details, please refer to the PDF document or feel free to contact us.

basic information

【Other Features】 - The connection between the main body and the joint is welded, and a metal seal structure is adopted for the external seal of the diaphragm section. - Thanks to its high external sealing capability, it can be safely used even with highly pure gases. - It employs a tide diaphragm type, which has a strong structure for supplying liquefied gases. - Springs have been eliminated from the gas contact area to reduce the risk of particle generation. - By providing heated supply, it can also accommodate gases with a vapor pressure of 1.0 MPa or higher. - The "SH series" is available, using a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in gas contact. *For more details, please refer to the PDF document or feel free to contact us.