High Purity Gas Pressure Regulator "TORR-2300 Series"
Reduce the occurrence of internal leaks! Usable in primary pressure reduction equipment for liquefied gases with high steam pressure.
The "TORR-2300 series" is a pressure regulator for high-purity gases that can also be manufactured with an electropolished specification. The TORR series is a pressure regulator that has earned high trust due to its long track record, often referred to as the "symbol of pressure regulators for semiconductor gases." It conducts a complete inspection, including He leak tests, on all units before shipment. As a medium flow model for primary high pressure, it is used in primary pressure reduction equipment that requires higher flow than the "TORR-1300," as well as in primary pressure reduction equipment for liquefied gases with high vapor pressure. 【Features】 ■ Medium flow model for primary high pressure ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3μm ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrence ■ Complete inspection, including He leak tests, is conducted on all units before shipment ■ Electropolished specifications can also be manufactured (surface roughness of gas-contacting metal parts Ra0.25μm) *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Maximum operating pressure at inlet: 20MPa ■ Maximum operating pressure at outlet: 1.0MPa ■ Maximum flow rate: 1,400L/min (normal) (P1=8MPa, P2=1.0MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 1.8kg (4 ports) ■ Built-in filter filtration degree: 20μm ■ Inlet and outlet port diameter: 1/4" ■ External leakage amount ・Less than 1.3×10^-9Pa·m3/sec (screw connection) ・Less than 1.3×10^-10Pa·m3/sec (welded connection) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.