High Purity Gas Pressure Regulator "TORR-2300 Series"
Reduce the occurrence of internal leaks! Usable in primary pressure reduction equipment for liquefied gases with high steam pressure.
The "TORR-2300 series" is a pressure regulator for high-purity gases that can also be manufactured with an electropolished specification. The TORR series is a pressure regulator that has earned high trust due to its long track record, often referred to as the "symbol of pressure regulators for semiconductor gases." It conducts a complete inspection, including He leak tests, on all units before shipment. As a medium flow model for primary high pressure, it is used in primary pressure reduction equipment that requires higher flow than the "TORR-1300," as well as in primary pressure reduction equipment for liquefied gases with high vapor pressure. 【Features】 ■ Medium flow model for primary high pressure ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3μm ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrence ■ Complete inspection, including He leak tests, is conducted on all units before shipment ■ Electropolished specifications can also be manufactured (surface roughness of gas-contacting metal parts Ra0.25μm) *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■ Maximum operating pressure at inlet: 20MPa ■ Maximum operating pressure at outlet: 1.0MPa ■ Maximum flow rate: 1,400L/min (normal) (P1=8MPa, P2=1.0MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 1.8kg (4 ports) ■ Built-in filter filtration degree: 20μm ■ Inlet and outlet port diameter: 1/4" ■ External leakage amount ・Less than 1.3×10^-9Pa·m3/sec (screw connection) ・Less than 1.3×10^-10Pa·m3/sec (welded connection) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
