High Purity Gas Pressure Regulator "TORR-150 Series"
Medium flow model for low pressure on the primary side! Assembly is carried out in a clean room with a class 1000 level of 0.3μm for all units!
The "TORR-150 series" is a high-purity gas pressure regulator with a gas-contact metal surface roughness of Ra 0.25 μm, and it is also capable of producing electropolished specifications. The TORR series is known as the "standard for semiconductor gas pressure regulators" due to its long-standing track record and high reliability. All units undergo a complete shipping inspection, including a He leak test. It can be used for applications such as primary pressure reduction of liquefied gases and regulators for piping that requires high flow rates, as a large flow model for low primary pressure. 【Features】 ■ Medium flow model for low primary pressure ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3 μm ■ Complete shipping inspection, including He leak tests, is performed on all units ■ Electropolished specifications can also be produced (gas-contact metal surface roughness Ra 0.25 μm) *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Performance】 ■ Maximum operating pressure on the inlet side: 2.0MPa ■ Maximum operating pressure on the outlet side: 0.6MPa ■ Maximum flow rate: 2,400L/min (nor) (P1=1.5MPa, P2=0.6MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 3.7kg ■ Inlet and outlet port diameter: 1/2" ■ External leakage rate: 1.3×10^-8Pa·m3/sec or less *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Usage】 ■ As a high-flow model for primary low-pressure applications, used for primary pressure reduction of liquefied gases or regulators used in piping that requires flow. * For more details, please refer to the PDF materials or feel free to contact us.
