Ultra-high purity gas pressure regulator "S-TORRV2300 Series"
High flow model for primary side high pressure! Widely used in primary pressure reduction equipment.
The "S-TORRV2300 series" is a pressure regulator developed based on the TORR regulators, which have gained immense trust in semiconductor process gas lines, designed for ultra-high purity gases. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. A helium leak test is conducted for all units as part of the shipping inspection. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy. Please contact us for more information. 【Features】 ■ Medium flow model for high pressure on the primary side ■ The connection between the main body and fittings is welded, and a metal seal structure is adopted for the external seal of the diaphragm section ■ High external sealing capability allows for safe use even with gases of high purity ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrences ■ Widely used in primary pressure reduction equipment such as cylinder cabinets *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other Features】 - Developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines. - Eliminated the threaded structure in the gas contact area and standardly applied electrolytic polishing. - Achieved extremely high moisture replacement characteristics and reduced particles. - Conducted shipping inspections on all units, including He leak tests. - Offered the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for corrosive gases. *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
