High Purity Gas Pressure Regulator "TORR-30 Series"
A pressure regulator with a built-in filter in the flow path of the first chamber! Widely usable for equipment after pressure reduction.
The "TORR-30 Series" is a high-purity gas pressure regulator designed for use in various applications after pressure reduction, such as valve boxes and piping down to indoor areas, serving as a standard model for low-pressure primary use. Production of electropolished specifications is also possible. Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units. The TORR series is known as the "representative of semiconductor gas pressure regulators," earning high trust due to its long track record. 【Features】 ■ Standard model for low-pressure primary side ■ Assembly conducted in a clean room with a class 1000 standard at 0.3μm for all units ■ Built-in filter in the primary chamber flow path to reduce internal leak occurrence ■ Comprehensive shipping inspection, including He leak tests, conducted on all units ■ Production of electropolished specifications is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Performance】 ■ Maximum operating pressure on the inlet side: 5MPa ■ Maximum operating pressure on the outlet side: 1.0MPa ■ Maximum flow rate: 300L/min (normal) (P1=1.0MPa, P2=0.6MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 1.1kg ■ Built-in filter filtration degree: 20μm ■ Inlet and outlet port diameter: 1/4" ■ External leakage amount ・Below 1.3×10^-9Pa·m3/sec (screw connection) ・Below 1.3×10^-10Pa·m3/sec (welded connection) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
