Ziboran Dedicated Pressure Regulator 'S-TORRV1900 Series'

Elimination of the screw structure in the gas connection section! A pressure regulator specifically designed for diborane that achieves particle reduction.

The "S-TORRV1900 Series" is a pressure regulator specifically designed for diborane, engineered to operate at an optimal intermediate pressure that minimizes internal leaks and makes it difficult to generate decaborane. The connection between the main body and fittings is welded, and the external seal of the diaphragm section employs a metal seal structure. With high external sealing performance, it can be used safely even with high-purity gases. The S-TORR regulator is a high-purity gas pressure regulator developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines. 【Features】 ■ Two-stage pressure reduction model exclusively for diborane ■ Elimination of threaded structures in the gas contact area, with standard electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ Comprehensive shipping inspection, including He leak tests, conducted on all units ■ Designed to operate at an optimal intermediate pressure that minimizes internal leaks and makes it difficult to generate decaborane *For more details, please refer to the PDF materials or feel free to contact us.

basic information

【Performance】 ■ Maximum operating pressure at inlet side: 15MPa ■ Maximum operating pressure at outlet side: 0.6MPa ■ Maximum flow rate: 30L/min (normal) (P1=10MPa, P2=0.6MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 1.2kg (2 ports), 1.6kg (3 ports) ■ Built-in filter filtration degree: 20μm ■ Surface roughness of gas contact metal parts: Ra0.25μm (optional: Ra0.1μm) ■ Inlet and outlet port diameter: 1/4" ■ External leakage rate: 1.3×10^-11Pa·m3/sec or less *For more details, please refer to the PDF document or feel free to contact us.