High Purity Gas Pressure Regulator "TORR-2500 Series"
Conducting shipping inspections on all units! A filter is built into the flow path of the primary chamber to reduce internal leaks!
The "TORR-2500 series" is a pressure regulator that is synonymous with "pressure regulators for semiconductor gas" and has earned high trust due to its long track record. It can be used in gas supply systems that require higher flow rates than the "TORR-2300" model, designed for high-pressure applications. We conduct shipping inspections on all units, including He leak tests. Assembly is performed in a clean room with a class 1000 standard at 0.3μm, and since it does not have a built-in filter, please install a filter in the piping. 【Features】 ■ High-flow model for primary high pressure ■ Assembly is performed in a clean room with a class 1000 standard at 0.3μm ■ Built-in filter in the primary chamber flow path reduces internal leak occurrences ■ Shipping inspections, including He leak tests, are conducted on all units ■ Usable in gas supply systems that require higher flow rates than the "TORR-2300" *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■ Maximum operating pressure at inlet: 15MPa ■ Maximum operating pressure at outlet: 1.0MPa ■ Maximum flow rate: 180m3/h (nor) (P1=8MPa, P2=1.0MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 4.9kg ■ Inlet and outlet port diameter: 3/8" ■ External leakage rate: 1.3×10^-6Pa·m3/sec or less *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
