High Purity Gas Pressure Regulator "TORR-50/80 Series"
Production of electro-polished specifications is also possible! A pressure regulator that can be called the "symbol of semiconductor gas pressure regulators."
The "TORR-50/80 Series" is a high-purity gas pressure regulator that undergoes a complete inspection, including He leak testing, for all units shipped. Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units. A filter is built into the flow path of the primary chamber to reduce the occurrence of internal leaks. It can be used as a medium flow model for low pressure on the primary side, suitable for applications such as primary pressure reduction of liquefied gases and regulators used in piping that requires flow control. 【Features】 ■ Medium flow model for low pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3μm for all units ■ A filter is built into the flow path of the primary chamber to reduce internal leak occurrence ■ Complete inspection, including He leak testing, is conducted for all units shipped ■ Custom manufacturing of electropolished products is also possible (surface roughness Ra 0.25μm for gas-contacting metal parts) *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Lineup】 ■TORR-50 Series ■TORR-80 Series *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
[Usage] ■ As a medium flow model for primary low pressure applications, used for primary pressure reduction of liquefied gas and regulators used in piping that requires flow. *For more details, please refer to the PDF document or feel free to contact us.*
