Mass production-oriented sheet-type automatic resist stripping and lift-off device "Takada Kogyo Co., Ltd."
A single-layer resist stripping and lift-off device with high stripping performance utilizing chemical reactions from heated organic solutions and physical assistance from a high-pressure jet.
A mass production-oriented resist stripping and metal lift-off processing device that combines a standard straight nozzle with a high-pressure jet nozzle. The one-chamber type, which performs resist stripping, lift-off, rinsing, and drying all in one chamber, contributes not only to high throughput but also to a reduced footprint. Additionally, it is possible to separate and recover the used chemicals for reuse, which helps reduce running costs. *It can also be repurposed as an organic cleaning device, not just for resist stripping and lift-off. 【Features】 ■ Unique jet lift-off mechanism with high stripping performance ■ Improved flexibility and reduced running costs to accommodate small quantities of various products and fluctuations in production volume ■ Improved quality and yield through single wafer processing (achieving precise processing without cross-contamination and enhancing uniformity and control across the surface) *For more details, please contact us or download the PDF for further information.
basic information
【Specifications】 ■ Compatible work sizes are 2 to 8 inches (for square substrates, please inquire about 12 inches) ■ Automatic transport of workpieces by a SCARA robot ■ Heating function for chemical solutions ■ Equipped with an automatic fire extinguishing system and safety features such as explosion-proof glass ■ Automatic cleaning function inside the chamber ■ Various nozzle specifications can be modified (for details, please inquire) ■ Anti-backside wraparound feature ■ Expandable up to a maximum of 4 chambers ■ Compatible with upper-level communication systems
Price range
P8
Delivery Time
OTHER
Model number/Brand name
TWP Series
Applications/Examples of results
Optical devices (such as LEDs), SAW devices, power devices, high-frequency devices, MEMS, etc.