Prototype development of a single-sheet automatic resist peeling and lift-off device "manufactured by Takada Kogyo Co., Ltd."
A single-layer resist stripping and lift-off device with high stripping performance utilizing chemical reactions from heated organic solutions and physical assistance from a high-pressure jet.
A research and development device that combines a standard straight nozzle with a high-pressure jet nozzle, designed for resist stripping and metal lift-off processes for small-scale production. It features a compact design that can be installed in tight spaces (approximately 40% more compact than conventional models). The one-chamber system performs resist stripping, lift-off, rinsing, and drying all in a single chamber, contributing not only to high throughput but also to reduced footprint. Additionally, it is possible to separate and recover the used chemicals for reuse, which helps reduce running costs. *It can also be repurposed as an organic cleaning device, not just for resist stripping and lift-off.*
basic information
【Specifications】 ■ Compatible work sizes are 2 to 8 inches (for square substrates, please inquire about 12 inches) ■ Automatic transport of workpieces by a SCARA robot ■ Heating function for chemical solutions ■ Safety features including an automatic fire extinguishing system and explosion-proof glass ■ Automatic cleaning function inside the chamber ■ Various nozzle specifications can be changed (for details, please inquire) ■ Backside wrap-around prevention feature
Price range
P7
Delivery Time
OTHER
Model number/Brand name
TWPｍ
Applications/Examples of results
Optical devices (such as LEDs), SAW devices, power devices, high-frequency devices, MEMS, etc.
