Batch-type cleaning equipment
We provide batch-type cleaning equipment that utilizes cleaning technology and transport/control technology, compatible with various chemical solutions.
With years of experience backing us, we utilize clean technology, transport/control technology, and more to design and manufacture optimal equipment for our customers with our total engineering capabilities. Using various engineering tools, including 3D CAD, we deliver space-saving and user-friendly equipment. *For more details, please download the PDF or contact us.*
basic information
Device Specifications [Cleaning Target] Up to 12-inch cassette (please consult for applicable sizes) [Tank Configuration] Loader (can be underwater) → Processing tank (up to 9 tanks) → Unloader *Drying is selected based on the above drying methods.
Price range
Delivery Time
Applications/Examples of results
Device Configuration 【 Chemicals 】 Inorganic chemicals such as APM, HPM, SPM, organic chemicals such as IPA developer, and various cleaning solutions 【 Transport 】 Cassette/Drum and carrierless 【 Cleaning Targets 】 Spin dryer / Rinse dryer / IPA dryer
