Appearance inspection equipment for power device chips
Automating defect inspection with high precision! Achieving no visual inspection through the automation of inspection on all six sides!
This is an appearance inspection device that automates defect inspection of power device chips with high precision. By automating the inspection of all six surfaces, it achieves 2D high-precision defect inspection without visual inspection (target products: chips for IGBTs, power diodes, etc.). In side inspections, focus shifts caused by XYθ misalignment are corrected for each workpiece, ensuring that fine defects are reliably detected with just the right focus. For top and bottom inspections, multi-angle lighting combined with multiple imaging captures inspection images suitable for various defect modes, ensuring that targeted defects are reliably detected. 【Features】 ■ High resolution: High-resolution inspection with a maximum 25Mpix camera ■ Suitable lighting environment: Multi-angle lighting ■ High-speed control and capture: Continuous capture of multiple optimal images for each defect mode *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Main Specifications】 ■ Target Devices: Chips for IGBT / Chips for Power Diodes (3×3mm to 20×20mm) ■ Target Trays: 2-inch / 4-inch Chip Trays ■ Cycle Time: 0.9 sec / pcs (2 sec / pcs) ■ Inspection Items ・Top Surface Inspection: Cracks, Burrs, Foreign Object Attachment, Scratches, Discoloration, Stains, Dirt, etc. ・Bottom Surface Inspection: Cracks, Burrs, Foreign Object Attachment, Scratches, Discoloration, Stains, Dirt, etc. ■ Utilities ・Power Supply: 3Phase AC 200V ±10% 5KVA ・Air Supply: 0.39MPa or more 100L/min or more ・Equipment Size: 2,420(W) × 1,930(D) × 2,000(H) mm ・Equipment Weight: Approximately 2,200 kg * For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Purpose】 ■Appearance inspection of power device chips *For more details, please refer to the PDF document or feel free to contact us.
