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Microwave oscillator(16)
This is a device that generates microwaves at a frequency of 2450 MHz, primarily used as a power source for plasma discharge, microwave dielectric heating, and chemical reactions using microwaves. Our system has over 30 years of supply experience for major semiconductor equipment manufacturers and electronic device manufacturers. The equipment consists of three main components: the "oscillation unit," which houses the magnetron tube that generates microwaves; the "power supply unit," which provides the necessary current/voltage to the oscillation unit; and a cable set (standard 7m) for connecting the oscillation unit and power supply unit. There are three models available: 1700W, 3000W, and 6000W, each featuring characteristics such as compactness, lightweight design, and remote control functionality.
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マイクロ波加熱(1)
専用のマイクロ波加熱装置やマイクロ波加熱システムの受託開発
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大気圧プラズマ処理(1)
AURORA 大気圧プラズマ処理ユニット AURORAは、従来の大気圧プラズマ処理では実用化が困難だった表面処理を「業界最高クラスの高速パルス出力」と「ハイパワーかつ連続運転可能なリアクタ」で実現しました。 誘電体バリア放電（DBD）方式を採用した大気圧プラズマ処理ユニットで、銅箔やFPCなどの表面に対して濡れ性改善、精密洗浄、酸化膜の還元などの処理をインラインで行える装置です。真空チャンバーを必要とせず、大気圧下で連続処理が可能です。 リチウムイオン電池、キャパシタ、FCCL、FFC、FPC、太陽電池、シールドなどの製品に使用される銅箔（Cu）等の薄型材料処理に効果を発揮します。 また、樹脂材料フィルムなどの高速搬送の表面改質や精密洗浄用途でもご検討いただけます。
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Integrator(4)
This is a device used to match the impedance between the load (the target of microwave irradiation) and the oscillator in order to efficiently transmit microwaves to the load. There are two types: an automatic type that detects standing waves in the waveguide, calculates the load's impedance, and performs automatic matching, and a manual type where a person adjusts the stub while observing a reflection meter. In the case of plasma loads with significant impedance fluctuations, an automatic matcher is essential.
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Isolator(2)
This is a device designed to protect the oscillator from reflected microwaves. If the microwave irradiation to the load (the heating target) is inappropriate, or if the load is inherently difficult to absorb microwaves, the unabsorbed microwaves can return to the oscillator side as reflected waves, causing reverse heating of the magnetron and potentially damaging it. To prevent this, an isolator bends the reflected waves towards the dummy load, allowing them to be absorbed by the dummy load. There are two types: air-cooled and water-cooled.
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Waveguide / Transforming waveguide(4)
Generally, coaxial lines are commonly used for transmission lines below 3GHz, but waveguides are used for kW-level microwave power transmission in industrial applications. (The waveguide transmission line is referred to as a "three-dimensional circuit" in contrast to cables.) There are various standards for waveguides depending on the transmission frequency and purpose, but the ones we manufacture and sell are mainly the WRJ-2 standard waveguide and the WRT-2 standard waveguide (commonly known as Toshiba standard waveguides). We keep standard stock of straight tubes, E-corners, and H-corners (made of aluminum), and we also accommodate custom orders (such as wanting stainless steel material or specific dimensions). Coaxial waveguide converters are used when converting from waveguides to coaxial lines, and we offer two types: WRJ-2⇔WX-39D and WRJ-2⇔WX-20D. A vacuum window allows for the introduction of microwaves into a vacuum load (such as a vacuum chamber) by being inserted between the microwave three-dimensional circuit and the vacuum load. Additionally, it can be used to prevent the intrusion of gases (such as outgassing from the heated object or water vapor) into the waveguide.
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Other equipment(6)
The abnormal discharge detector is a protective device that outputs an alarm signal when it detects abnormal discharges within the waveguide, as its name suggests. When abnormal discharges occur in the waveguide, they often lead to significant damage (such as damage to the magnetron), so it is advisable to use it in situations such as when conducting an experiment for the first time or when the sample is known in advance to have low microwave absorption (low dielectric constant and low dielectric loss). The movable short-circuit plate is inserted into the waveguide (essentially a straight tube) at the end of the transmission path and is used as a termination adjuster for standing wave adjustment.
