Flat Base Heater for Semiconductors

Optimal for wafer heating! Improve production efficiency with high-performance, long-life heaters!

In the wafer heating process of semiconductor manufacturing, uniform temperature management is required. Conventional band heaters have issues with low thermal efficiency and a tendency to create temperature variations. Therefore, Chubu Nippon Heater Co., Ltd. has developed a high-performance, long-life "Flat Base Heater." 【Application Scenarios】 * Heating of liquid supply nozzles * Heating of gas supply nozzles in CVD equipment * Heating of adhesive dispensing nozzles in assembly equipment * Temperature control of cooling water supply nozzles in dicing equipment 【Benefits of Implementation】 The Flat Base Heater improves thermal efficiency compared to conventional band heaters and suppresses temperature variations, achieving uniform heating of wafers. This contributes to improved product quality and yield. Additionally, its long-life design reduces the frequency of replacements, leading to lower maintenance costs.

basic information

【Features】 * Lightweight and thin (3mm), with flexible lead wire extraction direction * Completely sealed, preventing the entry of melted resin, oil, etc., eliminating concerns about disconnection failures * High-temperature design possible (10W/cm2), capable of continuous use at a regular temperature of 600°C for heated objects * Excellent thermal conductivity, allowing the flexible heater body to easily adhere to any surface * Improved thermal efficiency compared to conventional band heaters, reducing temperature unevenness Our Strengths Chunihon Heater Co., Ltd. always keeps a stock of various heaters, including cartridge heaters, and can promptly respond to heating needs. We offer a variety of products such as NNH cartridge heaters, NNH nozzle heaters, and NNH sheath heaters, so please feel free to consult us with your requests.