Turbo molecular pump
Turbo molecular pump
Vacuum pump for high vacuum. It is characterized by its ability to achieve clean high vacuum. It has a proven track record in industries that require high vacuum, such as semiconductors, FPD, and solar cells.
1～30 item / All 40 items
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Power supply unit and pump integrated turbo molecular pump
New product TGkine4200M released!! No unnecessary wiring needed, improving work efficiency and maintainability!
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Controller and power supply integrated magnetic bearing turbo molecular pump
Unnecessary wiring is eliminated, improving work efficiency and maintainability!
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Compound Molecular Pump TG203
Oil-lubricated spherical bearing type turbo molecular pump
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Compound Molecular Pump TG553
Oil-lubricated turbo molecular pump with a jewel bearing type.
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Compound Molecular Pump TG1003
Oil-lubricated spherical bearing type turbo molecular pump
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Compound Molecular Pump TG1303
Oil-lubricated turbo molecular pump with a jewel bearing type.
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Compound Molecular Pump TG1810/1813
Oil-lubricated spherical bearing type turbo molecular pump
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Compound Molecular Pump TG2813
Oil-lubricated turbo molecular pump with a ball bearing type.
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Compound Molecular Pump TG3213
Oil-lubricated turbo molecular pump with a jewel bearing type.
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Compound Molecular Pump TG3413
Oil-lubricated turbo molecular pump with a ball bearing type.
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Compound Molecular Pump TG5000/5003 TG5500/5503
Oil-lubricated turbo molecular pump with a jewel bearing type.
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Magnetic Bearing Type Composite Molecular Pump (TG-M Series)
Wide-range exhaust: It supports exhaust from low to ultra-high vacuum across a wide range.
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Posture-flexible composite molecular pump TG70F
Versatile mounting posture integrated power supply turbo molecular pump
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Posture-flexible composite molecular pump TG240F
Versatile installation posture integrated power supply turbo molecular pump
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Posture-flexible composite molecular pump TG50F
Versatile installation posture grease-lubricated bearing type turbo molecular pump
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Posture-flexible composite molecular pump TG220F
Versatile installation posture grease-lubricated bearing type turbo molecular pump
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Posture-flexible composite molecular pump TG350F
Versatile installation posture grease-lubricated bearing type turbo molecular pump
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Posture-flexible composite molecular pump TG450F
Versatile installation posture grease-lubricated bearing type turbo molecular pump
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Posture-flexible composite molecular pump TG1100F
Versatile installation posture grease-lubricated bearing type turbo molecular pump
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Posture-flexible composite molecular pump TG1400F
Versatile installation posture grease-lubricated bearing type turbo molecular pump
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Posture-flexible composite molecular pump TG2400F
A turbo molecular pump that is strong against atmospheric entry and allows for flexible mounting positions.
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Magnetic Bearing Type Composite Molecular Pump TG420M
Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.
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Magnetic Bearing Type Composite Molecular Pump TG900M
Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.
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Magnetic Bearing Type Composite Molecular Pump TG1300M
Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.
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Magnetic bearing type composite molecular pump TG2400M
High flow rate turbo molecular pump compatible with exhaust and low vibration.
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Ultra-high vacuum magnetic bearing composite molecular pump (high compression type) TG-MU
Ultra-high vacuum specification turbo molecular pump
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Ultra-low vibration magnetic bearing type molecular pump TG-ML series
A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!
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Reaction product corresponding magnetic bearing type composite molecular pump TG-MI series
Significantly reduced the deposition of reaction products generated in the process onto the pump through unique generation product countermeasures!
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Radiation-resistant specification magnetic bearing composite molecular pump TG-MR series
Turbo molecular pump developed for use in radiation environments!
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Turbo Molecular Pump Exhaust System ST Series
Turbo molecular pump exhaust unit with casters
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