Turbo molecular pump
Turbo molecular pump
Vacuum pump for high vacuum. It is characterized by its ability to achieve clean high vacuum. It has a proven track record in industries that require high vacuum, such as semiconductors, FPD, and solar cells.
31～40 item / All 40 items
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Turbo molecular pump exhaust system ST-Compact
Tabletop turbo molecular pump exhaust system
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Grease-lubricated bearing type turbo molecular pump TG60F
The installation position is flexible! A compact-sized combined molecular pump with an integrated controller!
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Flexible Positioning Compound Molecular Pump (TG-F Series)
A grease-lubricated bearing type turbo molecular pump that supports a wide range of exhaust from low to ultra-high vacuum and can be installed in various orientations.
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Oil-lubricated composite molecular pump (TG series)
Compatible with corrosive gas exhaust. Strong structure against dust, resulting in fewer pump troubles due to dust contamination. Robust design resistant to atmospheric intrusion.
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New Magnetic Bearing Turbo Molecular Pump "TG397M～1307M"
Settings parameters and operational data can be stored in the pump body!
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Turbo molecular pump for analysis and measurement devices TG70F/240F
Compatible with installation in analysis devices and measurement systems! High-performance turbo molecular pump that enables miniaturization of equipment. *Catalog available.
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Vacuum pumps for semiconductors *Exhibited at SEMICON Japan 2019
Introducing pumps necessary for electronic components and semiconductor manufacturing, such as turbo molecular pumps and dry vacuum pumps!
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Osaka Vacuum Equipment Manufacturing Co., Ltd. Product Information
A lineup of easy-to-handle liquid-sealed vacuum pumps and reliable ejectors!
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【Case Study】High Vacuum Exhaust System for X-ray Measurement Experiment Vacuum Chamber
Dry vacuum pumps achieve oil-free and clean exhaust without using oil in the exhaust flow path!
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[Case Study] Vacuum Pump for Coating Metal Parts
Our turbo molecular pumps are adopted by many equipment manufacturers both domestically and internationally!
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