Spin Sonic Cleaner

Simultaneous non-contact cleaning of both sides of the wafer, even for submicron particles.

last updated Oct 22, 2025

Cleaning Unit "Fine Sonic"

Batch-type megasonic! Various frequencies such as 750kHz and 2000kHz can be selected.

last updated Oct 08, 2025

Cleaning Unit "Fine Scroll"

Introduction of sheet and flat feeding cleaning tools for small substrates to large LCD panels!

last updated Oct 08, 2025

Cleaning Unit "Fine Jet"

Stable oscillation from low to high output to meet a wide range of needs for single-sheet cleaning!

last updated Oct 08, 2025