Duct Series
Duct Series
Ventilation method "Suction Duct System," duct series that is difficult to leak air.
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Ventilation method: Suction duct system [Patent No. 3883483]
It is the optimal ventilation method that meets the guidelines as a measure against dust generation sources.
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Duct series that is difficult to leak air.
The leakage air volume is almost "zero" for the positive pressure duct "Non-Leak Duct" and for the negative pressure duct "Pita Joint Duct" used in high-pressure ventilation systems such as long-distance shields.
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