Mass production process exposure device "Fully Automatic Mask Aligner"
We offer sizes of 4 inches and 8 inches! It has high versatility compatible with round and square samples.
We would like to introduce our mass production process exposure equipment, the "Fully Automatic Mask Aligner." It achieves a simple structure at a low cost. It has high versatility compatible with circular and square samples. We offer the "ALA410" for 4-inch size and the "ALA810" for 8-inch size. 【Features】 ■ High versatility (compatible with circular and square samples) ■ Reliable spherical bearing parallel mechanism ■ Achieves low cost with a simple structure ■ Available in Φ4in, Φ6in, and Φ8in specifications ■ CToC automatic transport *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■Exposure light source: Illuminance distribution within ±5% ■Exposure resolution ・Soft contact L/S 3μm ・Hard contact L/S 1μm ■Alignment accuracy ・Top-side ±1μm ・Bottom-side ±3μm *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Purpose】 ■ For mass production processes *For more details, please refer to the PDF document or feel free to contact us.
