UV Nanoimprint Stepper
Supports 2 to 8-inch wafers! Equipped with high-precision alignment necessary for device fabrication!
We would like to introduce our "UV Nanoimprint Stepper." It uses a roll transfer method with large resin molds, allowing for simultaneous full-area transfer. Additionally, we offer a heating mechanism as an optional extra, with high-precision transfer pressure control. 【Features】 ■ Compatible with 2 to 8-inch wafers ■ High-precision alignment necessary for device fabrication ■ High-precision transfer pressure control ■ Optional heating mechanism *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications】 ■Model: ImpFlex-Essential Stepper ■Transfer Method: UV Nanoimprint ■Applicable Work: φ2 to 8 inches ■Mold: Quartz Mold, PDMS Mold ■Resist Coating: Pre-treatment by Spin Coater or Inkjet ■Alignment Accuracy: 1μm (depending on alignment mark size) ■External Dimensions: 1800 (H) × 760 (W) × 1160 (D) *For more details, please refer to the PDF document or feel free to contact us.
Price range
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
