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Business Introduction of Sumix Corporation for the Manufacturing Industry
Pioneers of macro inspection! Visualizing nano-level variations and unevenness.
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Surface Roughness Visualization Unit for Semiconductor Quality Control
Capture nano-level crystal defects at a macro scale to improve the accuracy of quality control.
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Macro inspection device | High-speed simultaneous detection of foreign substances, film unevenness, and defects on wafers.
Imaging 12-inch wafers in 7 seconds. With a unique optical system that captures defects without resolution, inspection time is shortened to one-fourth of the industry standard, enabling 100% inspection.
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Film Thickness Variation Visualization System | Quantitative Observation of Resist Coating Non-uniformity
Capture the thickness difference with "color." It visualizes the subtle variations and differences in dispensing conditions that arise from the characteristics of viscous fluids with ultra-high sensitivity.
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Macro Pattern Inspection Module | High-speed evaluation of dimensional changes at the nano level
Achieved a correlation R²=0.96 for the measured long SEM data. Quantitatively observed a wide range of chip pattern size variations as changes in image brightness.
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Surface Roughness Visualization Unit | Capturing Nano-Level Crystal Defects at a Macro Scale
Visualizing minute changes of 3nm. By using an off-axis optical system and edge reflection light detection, we capture the distortion and scratches on the wafer surface in a wide area at once.
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Wafer Foreign Object Inspection Module | High-speed detection of 0.1μm at macro level
The night vision optical system does not miss tiny foreign objects. With a unique technology that captures Mie scattered light without resolving, it conducts a complete inspection of 12-inch wafers in just 7 seconds.
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Macro inspection device "ARCscan Type RE & ME compatible"
A tool that enables high-speed, high-sensitivity, and large-area macro observation, which has been difficult until now!
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Smix Corporation Business Introduction
Pioneers of macro inspection! Visualizing nano-level variations and unevenness.
last updated