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6-axis robot for semiconductors

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Semicon - Wafer carrier.jpg
Semicon - Wafer fabrication.jpg
Semicon - Photomask.jpg

6-axis robot for semiconductors

Semicon - Wafer carrier.jpg
Semicon - Wafer carrier.jpg Semicon - Wafer fabrication.jpg Semicon - Photomask.jpg

Super cleanroom compatible high-precision 6-axis robot

Robots required for semiconductor applications, which necessitate a delicate process, must not only be suitable for super cleanroom environments but also possess high reliability and precision to achieve high productivity. The TX2 SCR series has a proven track record in carrier transport and wafer and mask processes in super cleanrooms.

Related Link - https://www.staubli.com/jp/ja/robotics/industries/…

basic information

TX2 SCR Series Reach Range: 670 to 2010 mm Payload: 3.7 kg to 40 kg Cleanliness: ISO Class 2

Price information

Please contact us.

Delivery Time

Model number/Brand name

TX2 SCR Series

Applications/Examples of results

Carrier transport Mask inspection Mask attachment Wafer inspection

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Stäubli has four business divisions: electrical connectors, fluid connectors, industrial robots, and textile machinery. Based on our exceptional expertise and years of accumulated know-how, we provide mechatronics solutions to various industrial sectors. Founded in 1892 as a small textile machinery repair shop near Zurich, Switzerland, Stäubli has grown into a global company operating in 28 countries and having sales partners/agents in 50 countries across four continents. In 1983, Stäubli Corporation was established in Osaka as a unit for business in Japan. We have a showroom in Nishi-Tenma (Osaka), so please feel free to visit us (by appointment only).

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