Pulsation-free, quantitative pump 'TPL' for semiconductor manufacturing
Achieving a reproducibility accuracy of ±0.1% or less in high-precision coating for semiconductor manufacturing.
In the semiconductor manufacturing industry, extremely high precision is required for the formation of fine circuits and the application of functional materials. Particularly in thin film coating processes for optical films and separators, the uniformity and reproducibility of materials significantly affect product performance, making variations in fine dimensions and coating irregularities unacceptable. To address these challenges, Takumina's Smooth Flow Pump TPL provides continuous constant flow with a reproducibility accuracy of ±0.1% or less and a pulsation rate of ±1% or less, supporting high-precision coating processes. 【Application Scenarios】 - Thin film coating of functional films such as optical films and separators - Precision metering processes - Inline injection 【Benefits of Implementation】 - Improved product yield due to enhanced coating accuracy - Enhanced functionality through uniform coating - Increased productivity through stable flow supply
basic information
【Features】 - Achieves precision coating with a reproducibility accuracy of ±0.1% or less and a pulsation rate of ±1% or less. - Strong against slurries, with no liquid leakage. - Allows for parts replacement and maintenance without removing the chemical piping. - Extends diaphragm lifespan by approximately four times, reducing maintenance frequency. - Compatible with CIP cleaning, reducing contamination risks. 【Our Strengths】 Takumina Co., Ltd. is a leading company in precision pumps with over 67 years of history. Since our founding, we have provided innovative fluid solutions to address our customers' challenging issues. We continue to be chosen in various manufacturing processes that require stringent accuracy, including the electronic materials field, and we excel in proposing optimal pump selection and transfer systems tailored to our customers' needs. We also accept inquiries for rental machines and actual liquid testing, so please feel free to contact us regarding any concerns about pump selection or fluid transfer.
Price information
Please feel free to contact us for a rough estimate.
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Model number/Brand name
smooth flow pump
Applications/Examples of results
Numerous achievements in precision thin film coating such as optical films, two-component continuous mixing, liquid delivery for liquid chromatography, delivery to dip tanks, and high-precision metering and injection. For more details, please visit the official website.
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Takumina Co., Ltd. is a leading company in precision pumps, welcoming all challenges as a "fluid solutions" provider. With a history of over 67 years since its founding, it is a long-established manufacturer that was the first in Japan to start producing powered metering pumps. Before the widespread adoption of water supply systems, it began manufacturing and selling suction-type chlorine disinfection machines, and the difficult challenges faced by customers have shaped Takumina's "pump technology" over the years. Currently, our pumps continue to be chosen in various manufacturing processes that require severe precision, including electronic materials and pharmaceuticals. Our smooth flow pumps, which provide high-precision liquid delivery with a continuous, pulsation-free flow despite being diaphragm-type, are strong against slurries, contamination-free, and do not alter liquid quality. We offer fluid solutions used in various manufacturing, transfer, supply, and injection processes, starting with the water treatment field. Takumina is committed to understanding the characteristics of liquids and the various conditions of processes to propose optimal transfer systems. We provide suggestions from research and development to manufacturing processes. We also accept inquiries about rental machines and actual liquid tests. If you have any difficulties in choosing pumps or fluid transfer, please feel free to contact us.