Q Series Non-Pulsating, Quantitative, Slurry Pump for Semiconductors
For stable liquid delivery of photoresist. Precision metering pump in 0.01mL increments.
In the semiconductor industry, precise application of photoresist, which is essential for forming fine circuit patterns, is required. Photoresist may contain fine particles, and variations in flow rate or particle sedimentation during transfer can affect application accuracy. To achieve uniform and stable application, a pump capable of stable liquid delivery over long periods, even at low flow rates, is necessary. Our Q Pump series addresses these challenges and enables stable transfer of photoresist. [Usage Scenarios] - Supply of photoresist - Precise application of small amounts of liquid - Reagent supply in research and development [Effects of Implementation] - Improved application accuracy - Enhanced yield - Maintenance of stable productivity
basic information
**Features** - Precise flow rate settings in 0.01mL increments - High delivery accuracy that remains consistent over long periods - Continuous, steady flow without pulsation to minimize changes in liquid quality - Compatible with the transfer of slurry liquids - Designed to be resistant to damage from dry running or abnormal pressure **Our Strengths** Takumina Co., Ltd. is a long-established manufacturer of precision pumps with over 67 years of history. We provide "fluid solutions" that solve the challenging issues faced by our customers and continue to be chosen in various manufacturing processes that require stringent accuracy, including the electronic materials field. From research and development to manufacturing processes, we propose the optimal transfer systems for our customers. We also accept inquiries regarding rental units and actual liquid testing.
Price information
Please feel free to contact us for an estimated quote.
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Model number/Brand name
Smooth Flow Pump
Applications/Examples of results
【Purpose】 ■ Precise micro-volume liquid delivery in lab processes *For more details, please refer to the PDF document or feel free to contact us.
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Takumina Co., Ltd. is a leading company in precision pumps, welcoming all challenges as a "fluid solutions" provider. With a history of over 67 years since its founding, it is a long-established manufacturer that was the first in Japan to start producing powered metering pumps. Before the widespread adoption of water supply systems, it began manufacturing and selling suction-type chlorine disinfection machines, and the difficult challenges faced by customers have shaped Takumina's "pump technology" over the years. Currently, our pumps continue to be chosen in various manufacturing processes that require severe precision, including electronic materials and pharmaceuticals. Our smooth flow pumps, which provide high-precision liquid delivery with a continuous, pulsation-free flow despite being diaphragm-type, are strong against slurries, contamination-free, and do not alter liquid quality. We offer fluid solutions used in various manufacturing, transfer, supply, and injection processes, starting with the water treatment field. Takumina is committed to understanding the characteristics of liquids and the various conditions of processes to propose optimal transfer systems. We provide suggestions from research and development to manufacturing processes. We also accept inquiries about rental machines and actual liquid tests. If you have any difficulties in choosing pumps or fluid transfer, please feel free to contact us.