High-precision metal processing for semiconductor manufacturing equipment
Achieving cost reduction and shorter delivery times for vacuum chambers!
In the semiconductor manufacturing equipment industry, precise machining of vacuum chambers is required. Vacuum chambers are essential for high airtightness and durability in the semiconductor manufacturing process, and precision of less than 0.01mm may be required. Low-precision machining can lead to vacuum leaks and a decrease in equipment performance. Our composite vertical NC lathe provides high-precision metal machining to address these challenges. 【Application Scenarios】 - Manufacturing of vacuum chambers - Machining of semiconductor manufacturing equipment parts - Production of metal components requiring high precision 【Benefits of Implementation】 - Improved product quality through high-precision machining - Cost reduction through process consolidation - Achievement of shorter delivery times
basic information
【Features】 - Multiple composite vertical NC lathes with a table size of Φ1600mm - Processing results with flatness within 0.01mm and parallelism within 0.01mm - Capable of handling steel, SUS, aluminum, heat-resistant alloys, etc. - Support from prototyping to mass production - Cycle time reduction through process design 【Our Strengths】 Since our establishment in 1979, we have combined the technical skills cultivated as a comprehensive parts processing manufacturer with high-precision processing technology using composite vertical NC lathes to meet our customers' needs.
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Applications/Examples of results
■Parts for silicon wafer polishing equipment (SUS・S45C/Φ1500) ■Parts for pumps used in the transportation of low-temperature liquefied gases such as LNG (AL/Φ600～Φ800×L600～1200) ■Parts for power semiconductor manufacturing equipment (SUS/φ550×L800) etc *Delivery records with machining accuracy within flatness of 0.01mm, etc. *For more details, please download the PDF or feel free to contact us.
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Since its establishment in 1979, our company has been involved in the production of various turbine blades and large machine parts as a comprehensive parts processing manufacturer. In the field of turbine blades, we produce turbine blades used in steam turbines and gas turbines for power generation, as well as turbochargers for marine applications. In particular, turbine blades for generators that operate in extreme environments with high temperatures and high rotational speeds require difficult-to-cut materials, complex shapes, and three-dimensional curved surface processing, necessitating large sizes and the accumulation of advanced technology and excellent production equipment. We have established an environment that can respond to various customer demands and have made sincere efforts, resulting in the cultivation of production technology, machining capabilities, and quality that have been developed over many years, earning high evaluations and trust from major companies. Additionally, leveraging the high machining technology for difficult-to-cut materials cultivated in turbine blade production, we began processing aircraft engine parts in 1988. In response to customer demands, we consistently provide advanced manufacturing with a thorough quality control system. Furthermore, we excel in the processing of large machine parts in a wide range of fields, including large plant valves and equipment parts necessary for semiconductor manufacturing, and we actively challenge ourselves daily with the goal of being the top and best manufacturer of parts processing.