Low-pulse, ultra-high-resolution dispensing solution for semiconductor manufacturing.
Semiconductor process optimization: low pulsation, ultra-high precision liquid delivery solution.
In the further miniaturization and high integration of semiconductor manufacturing, what influences product quality and yield is **"the extreme precision of liquid handling."** Particularly in next-generation processes where even slight flow variations can lead to catastrophic defects, challenges have emerged that conventional liquid delivery systems cannot address. The Cavro Centris Pump provides unprecedented stability in each process as miniaturization advances, thanks to its industry-leading resolution (up to 192,000 steps). 【Application Scenes】 - Precision dispensing of photoresist (lithography) - Supply of resin for nanoimprinting - Flow control for slit die coating (thin film formation) - Automatic adjustment of electroless plating solutions - Additive management for electroplating (ECP) - Inline blending of chemicals - Precise supply of slurry and additives in CMP (chemical mechanical polishing) processes 【Effects of Implementation】 The Centris Pump eliminates slight variations and pulsations in discharge volume that can cause coating inconsistencies, contributing to a dramatic improvement in yield. Its compact design, intended for integration into equipment, maximizes design flexibility for upgrading existing systems and developing next-generation devices.
basic information
**Features** - Long-lasting ceramic valve and ceramic syringe - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space 69×45 mm) **Our Strengths** Tecan has a long-standing track record in the manufacturing and development of life science research support equipment. We provide products tailored to our customers' needs and support their problem-solving through technical assistance.
Price information
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Delivery Time
Model number/Brand name
Cavro Centris Pump Small Syringe Pump
Applications/Examples of results
Water quality testing, petroleum refining, food inspection, semiconductor cleaning.
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Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.