semiconductor industry
semiconductor industry
Our company is focusing on the development of seals for the semiconductor industry, particularly for semiconductor manufacturing equipment. In recent years, we have mainly been working on updating existing elastomer O-rings to our metal seals (for pump piping in vibration-prone exhaust devices and for existing flanges that require helium leaks where bolt hole modifications are not possible).
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Clamp for ultra-high vacuum and high-temperature NW/KF flanges QDS
Set of NW/KF flanges for ultra-high vacuum, dedicated helico and delta, and dedicated clamps! QDS: Quick Disconnect System
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[For the semiconductor industry] Replacement of rubber O-rings with spring-loaded C-rings HNRV
No need to change the size or number of existing bolts? A must-see for those struggling with "wanting to eliminate gas permeation and gas release from vacuum rubber O-rings" in semiconductor manufacturing equipment!
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Replace the rubber O-ring with a spring-energized metal C-ring! "Delta Beta HNRV"
"Replace rubber O-ring to metal seal, Eliminate gas permeation and gas release." This can be possible with Delta Beta HNRV.
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Metal seals for critical environments
It is used in the most demanding/critical environments such as accelerators, aerospace, and nuclear fusion reactors!
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Low design tightening pressure Y 'Ultra High Vacuum Delta Seal' for the semiconductor field
Delta Seal (HNV HELICOFLEX(R) DELTA) achieves ultra-high vacuum! [Standardized for JIS V-groove flanges]
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Metal seal adoption case: Chemical substance canister for semiconductor manufacturing
Good news for substances that cannot use resin or elastomer seal materials! By adopting metal seals, helium leak tightness has been achieved.
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