Introduction of various sensors for semiconductor manufacturing equipment & exhibition participation information
High-precision measurement of temperature, humidity, wind speed, and oxygen. Many compact models that are easy to integrate into devices! Ensuring long-term stability for semiconductor manufacturing processes.
Our company handles a variety of sensor products for semiconductor manufacturing equipment. Our main measurement product, the capacitive dew point meter "TK-100," which operates in the range of -100 to +20°C, is complemented by the high-response polymer dew point meter "TE-660TR," which operates from -60 to +20°C, and the galvanic oxygen concentration meter "2001RS," which provides output in percentage and PPM, among other offerings. Additionally, we will be exhibiting our dew point meters at the Thermotech exhibition, held every four years for industrial furnaces and thermal technology. We also plan to participate in semiconductor exhibitions, showcasing gas chromatographs, dew point meters, oxygen concentration meters, and temperature and humidity meters. 【Various sensor products for semiconductor manufacturing equipment now on sale】 ■ Dew Point Meters ・Capacitive Dew Point Meter TK-100 ・Polymer Dew Point Meter TE-660TR ■ Temperature and Humidity Meters ・High Precision EE310 ・Compact Probe EE08 ■ Anemometers ・Compact Probe EE671 ■ Oxygen Concentration Meters ・Galvanic Oxygen Concentration Meter 2001RS ■ Others ・Dew Point Handheld Unit TEKHNEPort 40 – LDPT *For more details, please download the PDF or feel free to contact us.
basic information
Our company will exhibit at the Thermotech exhibition, held every four years for industrial furnaces and thermal technology, where we plan to showcase dew point meters. Additionally, we will also participate in a semiconductor exhibition, displaying gas chromatographs, dew point meters, oxygen concentration meters, and temperature and humidity meters. 【Exhibition Information】 ＜Thermotech＞ ■ Dates: September 9 (Wed) - September 11 (Fri), 2026 ■ Venue: Tokyo Big Sight, South Halls 1 & 2 ■ Booth Number: S1-D024 ■ Exhibited Products: Dew point meters, oxygen concentration meters, moisture meters in oil, etc. ＜Kyushu Semiconductor Industry Exhibition＞ ■ Dates: September 30 (Wed) - October 1 (Thu), 2026 ■ Venue: Marine Messe Fukuoka, Halls A & B ■ Booth Number: A3-44 ■ Exhibited Products: Gas chromatographs, CRDS trace analyzers, dew point meters, oxygen concentration meters, temperature and humidity meters *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.