Small Chlorine Furnace | Compatible with MOCVD Fixtures and Quartz Boat Contaminant Removal
Volatile chlorination of GaN, AlN, and Si-based deposits with Cl2/HCl, and dry cleaning of the fixture.
In MOCVD and CVD processes, susceptors, quartz boats, quartz tubes, and fixtures may have reaction products containing GaN, AlN, Si-based materials, and metal components adhering to them. These deposits can be difficult to remove with chemical cleaning or mechanical methods, potentially leading to dimensional changes in the base material, surface roughness, damage, and increased cleaning costs. Our small chlorine furnace can convert these deposits into volatile chlorides through selective chlorination using Cl2/HCl, allowing for dry cleaning conditions while minimizing the impact on the base material. This small test furnace is suitable for cases where you want to reuse susceptors and quartz fixtures, reduce chemical cleaning, or extend the lifespan of fixtures. 【Features】 ■ Supports dry chlorination cleaning with Cl2/HCl ■ Allows for the consideration of removing GaN, AlN, Si-based deposits, and metal components ■ Addresses deposition films and reaction products that are difficult to remove with chemical cleaning ■ Enables the examination of conditions that minimize dimensional changes and surface roughness of the base material ■ Allows for comparison of temperature, gas concentration, and processing time with small fixtures *For more details, please download the materials or contact us.
basic information
**Concept of Dry Chlorination Cleaning** ■ Conversion of Contaminants to Chlorides - Using Cl2 and HCl to convert Ga, Al, Si, and metallic components into chlorides. - Utilizing the volatility of the generated chlorides to remove them from the surface of the fixtures. ■ Exploration of Conditions to Minimize Impact on Base Material - Adjusting treatment temperature, gas concentration, and treatment time. - Considering conditions suitable for the base material, such as quartz, SiC, carbon, and coating materials. ■ Differences from Liquid Chemical Cleaning - Reducing the burden of waste liquid treatment, drying processes, and chemical management. - Allowing for the treatment of hard-to-reach details, inner surfaces, and grooves that are difficult to access with liquid chemicals. - Contributing to the reduction of base material damage and recontamination risks. ■ Preliminary Evaluation in a Small Furnace - Conditions can be verified using small fixtures or test pieces. - Based on test results, consideration can be given to the development of dedicated cleaning furnaces or mass production equipment. *Specifications will be proposed according to fixture material, contaminants, treatment temperature, gas type, and removal conditions.*
Price information
*Please feel free to contact us for more details, as prices vary depending on the equipment specifications.
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Applications/Examples of results
【Applications】 ■ Dry cleaning of MOCVD susceptors and CVD fixtures ■ Removal of deposits from quartz boats, quartz tubes, and quartz fixtures ■ Investigation of the removal of GaN, AlN, Si-based products, and metal reaction products ■ Surface cleaning of SiC, carbon, and coated fixtures ■ Consideration of fixture regeneration, extension of fixture lifespan, and reduction of cleaning outsourcing costs ■ Evaluation of replacement from liquid cleaning to dry cleaning ■ Cleaning tests for manufacturing fixtures related to semiconductors, compound semiconductors, and LEDs 【For such challenges】 ■ Deposited films on susceptors and quartz fixtures are difficult to remove ■ Liquid cleaning roughens the substrate and causes dimensional changes ■ Desire to reduce cleaning outsourcing costs and fixture replacement costs ■ Need to clean the details, grooves, and inner surfaces of fixtures ■ Want to confirm dry cleaning conditions using Cl2/HCl in a small furnace ■ Want to evaluate substrate damage and reusability after cleaning Even at a stage where fixture material, deposits, processing temperature, gas concentration, and removal conditions are not yet determined, you can consult us according to your application.
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Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.