The ultrasonic cleaning nozzle manufactured by Sonosys is featured in Semi Net.
ティックコーポレーション 本社
We solve the cleaning issues of semiconductors and substrates.
SONOSYS offers a wide range of products in the field of ultrasonic and megasonic cleaning, with the goal of achieving excellent, damage-free cleaning results for fine micro and nano structures. By using SONOSYS systems, it is possible to save on power and chemical usage in wet bench processes, making them more efficient.
≪Product Overview≫
For non-contact single substrate cleaning, we have megasonic nozzles ranging from 600 kHz to a maximum of 9 MHz, equipped with either a single nozzle, dual nozzle, or triple channel, as well as any combination of frequencies. The transducer of this megasonic nozzle generates megasonic waves, which are sent through a fluid (such as pure water) to clean the surface of the substrate.
For non-contact cleaning of single substrates, we offer megasonic nozzles ranging from 600kHz to a maximum of 9MHz, equipped with either a single nozzle, dual nozzle, or triple channel, along with any combination of frequencies. The transducer of this megasonic nozzle generates megasonics and sends them through a fluid (such as pure water) to clean the surface of the substrate.
This is a demo of the spray nozzle type (megasonic) ultrasonic cleaning device. On the left side is a 1MHz single nozzle, and on the right side are 1MHz and 3MHz dual nozzles.
A collaborative product of Rehila's nozzle technology and Sonosys's ultrasonic technology.
Typically, when creating fine particles, pressurization is necessary. Alternatively, a method using two fluids, known as a two-fluid system, is commonly used to break down liquids. However, if the particles have too much velocity, the liquid may scatter, creating a poor environment. To improve this, ultrasonic spray nozzles are often used.
Features:
- Can supply liquid without pressurization, resulting in low power consumption (lower energy costs)
- Uniform atomization regardless of flow rate from minimum flow
- Particle size remains relatively consistent across the entire flow range
- Resistant to clogging, enhancing workplace safety
- Due to the slow self-velocity of the particles, coating efficiency is high
- Operating frequency ranges from 45 to 100 kHz (varies by model)
- Average particle diameter is approximately 20 μm to 40 μm (note: not a volume average)
Related catalog
[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)