Magnetron sputtering device for high-precision optical filter film deposition
The "FHR.Star.600-EOSS" is a high-performance magnetron sputtering device developed for precise optical filter film deposition.
We will demonstrate our capabilities in the stable production of high-performance optical filters that require multilayering and high reproducibility, such as LiDAR applications, which are expected to see significant demand in the future. - Film formation that eliminates the effects of film quality changes due to target wear using a cylindrical cathode - Stable film formation of oxide films using a reactive ion source - Film formation of a wide range of multilayer films with up to four cathodes This is a device specialized for high-quality optical thin film deposition. Features: ■ Outstanding reproducibility of optical multilayer films ■ Excellent film thickness uniformity ■ Improvement of film quality and defect-free deposition through the combination of cylindrical cathodes and sputter-up ■ Continuous monitoring of the film formation state through in-situ monitoring ■ Fully automated process control *For more details, please refer to the PDF document or feel free to contact us.
basic information
Basic Specifications of the Device ■ Adoption of Cylinder-Type Cathodes and Targets ▶ The target has a long lifespan, with minimal variation in film deposition rate until the end of its lifespan. ■ Capable of Mounting Up to Four Cathodes ▶ Allows for the production of a wide range of optical characteristic filters through various combinations of targets. ■ Equipped with an Ion Source for Reactive Deposition ▶ Enables the deposition of oxide and nitride films on substrates through ion irradiation during the deposition process. ■ Film Deposition on Large Substrates ▶ Compatible with substrates up to 300mm or 280×330×50 mm in size (flat or curved). ▶ Substrate heating mechanisms can also be integrated.
Price range
Delivery Time
Model number/Brand name
FHR Star EOSS Series
Applications/Examples of results
【Main Applications】 ■Anti-reflective coating ■Bandpass filter ■Edge filter ■Notch filter ■Dielectric mirror ■Dichroic mirror ■Beam splitter ■Polarizing filter ■Wearable display *For more details, please refer to the PDF document or feel free to contact us.
Line up（2）
| Model number | overview |
|---|---|
| FHR.Star.600-EOSS | High-performance magnetron sputtering device developed for precise optical filter film deposition |
| FHR.Star.500-EOSS | High-performance magnetron sputtering device developed for precise optical filter film deposition |
