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Electrostatic chuck for semiconductor manufacturing equipment
This is an electrostatic chuck for semiconductor manufacturing equipment. It can operate in atmospheric to high vacuum conditions and at temperatures ranging from -100 to 200°C. It can adsorb conductive to insulating substrates.
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Electrostatic adsorption stage for inspection equipment
A testing stage suitable for fixing thin materials such as film, metal foil, and paper!
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Electrostatic Chuck Supporter System Lineup
We have power supply fixtures tailored to your applications and adsorption targets!
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Electrostatic Chuck Supporter for Electrical Testing 'CP Supporter'
Reinforcement and fixation of thin wafers are possible with electric field control that does not require adhesive!
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Electrostatic chuck "Tin Hand" for automatic machines
No wrinkles or damage! An electrostatic adsorption tool capable of adsorbing perforated items like porous materials.
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Electrostatic chuck supporter
Thin thickness allows for insertion into the carrier while maintaining wafer adhesion!
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Handheld static electricity chuck "Soft Palm"
Ideal for transporting thin wafers, glass substrates, metal foils, films, and more! Eliminates localized stress on the objects caused by conventional vacuum suction methods!
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