Electrostatic Chuck Supporter System Lineup
We have power supply fixtures tailored to your applications and adsorption targets!
We would like to introduce the lineup of our "Electrostatic Chuck Supporter System." The electrostatic chuck supporters are available in four types: RS standard, CP, Hole, and PFA, and they accommodate sizes of 4 inch, 6 inch, 8 inch, and 12 inch. You can choose according to your application. We offer three types of power supply fixtures: Manual type, Semi-Auto type, and Full Auto type. 【Features by Supporter Type】 ■RS Standard: Matte surface ■CP: Conductive on both sides for electrical testing ■Hole: For large uneven wafers ■PFA: Chemical resistant *For more details, please download the PDF or feel free to contact us.
basic information
【Power Supply Fixture Lineup】 ■Manual type ■Semi-Auto type ■Full Auto type (Made to order) *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
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Tsukuba Seiko Co., Ltd. is a company primarily engaged in the development, manufacturing, and sales of electrostatic adsorption systems. Our electrostatic chucks are designed to assist you in improving yield and production efficiency for your technological innovations. We can accommodate your specifications from prototypes to mass production, so please feel free to contact us.