Low tightening pressure 'Ultra High Vacuum Delta Seal' for Semiconductor fields such as PVD, CVD, Etching device
Delta Seal (HNV HELICOFLEX(R) DELTA) achieves ultra-high vacuum! [Standardized for JIS V-groove flanges]
The Delta Seal (HNV HELICOFLEX(R) DELTA) has two delta-shaped protrusions on the contact side of the cross-section. The delta-shaped protrusions are designed to collapse and disappear during the compression of the outer casing when integrated into the flange groove, and the design tightening pressure of the Delta Seal is lower compared to the Helicoflex seal, allowing for replacement with elastomer O-rings. Leakage rate: *For circular shapes, 10⁻¹² Pa·m³/sec. (10⁻¹¹ atm·cm³/sec.) *Depends on the quality of the installation side. Also varies depending on the seal shape. 【Features】 ■Two delta-shaped protrusions on the contact side of the cross-section ■Achieves ultra-high vacuum ■Has excellent elasticity and can be used at high temperatures ■Can be replaced with elastomer O-rings *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■Dimensions: φ10 to 2000 ■Temperature: -272℃ to 520℃ (ductile outer sheath), -272℃ to 700℃ (low ductility outer sheath) ■Leak rate: *For circular shapes, 10⁻¹² Pa·m³/sec. (10⁻¹¹ atm·cm³/sec.) *Depends on the quality of the installation side. Varies with seal shape. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Technetics Group Japan, Inc. is the Japanese subsidiary's sales and technical department of a high-performance seal manufacturer that provides seal products (such as spring-energized C-rings, metal seals like HELICOFLEX(R) seals, and elastomeric expansion seals) customized to customer applications with flexible design support. Capital: 84.06 million yen. We deliver metal seals, inflatable seals, and elastic/graphite seals that demonstrate high performance in demanding sealing environments across various fields such as vacuum, semiconductors, nuclear power, nuclear fusion, petroleum refining, racing cars, valves and compressors, pharmaceutical manufacturing equipment, and aerospace, operating under extreme conditions from ultra-low temperatures to high temperatures and ultra-high vacuum to high pressure.