BS series research and development electron beam evaporation device
A vacuum deposition device that can be customized as needed according to its use and purpose.
The BS series electron beam evaporation system from Nippon Electronics Corporation is an evaporation device suitable for research and development as well as small-scale production. It can be equipped with various optional devices, and the chamber shape and load lock can be customized according to your requirements. 〇 Features - The evaporation sources can be selected from electron beam evaporation sources (electron guns), bombardment evaporation sources, and resistance heating evaporation sources, allowing for multiple units to be combined as desired. - Low-temperature and low-damage evaporation is possible with an electron gun plus a reflective electron trap, or through bombardment evaporation, making it particularly effective for lift-off evaporation using resist. - Stable evaporation of aluminum is achievable, and reusable liners are also provided. *For more details, please download the PDF or feel free to contact us.
basic information
[Option Examples] - Reflection Electron Suppression Unit - Substrate Heating - Substrate Cooling (Low-Temperature Film Formation) - Substrate Rotation Mechanism - Planetary Rotation Mechanism - Film Thickness Controller (Automatic Film Formation) - Load Lock Mechanism *For more details, please download the PDF or feel free to contact us.
Price information
Please contact us.
Delivery Time
Model number/Brand name
BS series
Applications/Examples of results
[Applications] Electrode films (Al, Au, Pt, Ni, Ti, Cr, etc.) for MEMS/power devices/LEDs/various electronic components, and metal oxide films for optical thin films.
