BS-60310BDS Bombard Evaporation Source
Damage-free deposition
Japan Electronics Corporation BS-60310BDS Bombard Evaporation Source An electron beam is irradiated onto the back surface of a liner filled with evaporation material, heating the liner through electron impact (bombardment). The evaporation material is not directly exposed to the electron beam. 〇Features - Indirect heating method - No damage from reflected electrons or X-rays during film formation - Splash is suppressed, allowing for low-defect film formation - No decomposition or compositional deviation - Low optical absorption - Stable film formation possible *For more details, please download the PDF or feel free to contact us.*
basic information
【Specifications】 BS-60310DBS: Bombard evaporation source, main unit, 6-point liner type Output: Maximum 1.2 kW *For more details, please refer to the PDF or feel free to contact us.
Price information
Please contact us regarding the price.
Price range
P5
Delivery Time
OTHER
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Model number/Brand name
BS-60310BDS
Applications/Examples of results
【Application】 Material deposition
