Cold Cathode Pirani Gauge "M-361CP"
Easy maintenance with only parts replacement! Contributes to cost reduction and management load reduction of the system with dual functionality.
The M-361CP is a combination gauge that integrates a Pirani gauge for measuring atmospheric pressure to medium vacuum and a cold cathode gauge for measuring high to ultra-high vacuum. It can measure a wide pressure range with a single unit, contributing to cost reduction and reduced management burden for the system by serving dual purposes. Additionally, it features easy maintenance with only parts replacement required. 【Features】 ■ Improved measurement stability - The newly developed discharge assist function reduces switching failures between the Pirani and cold cathode, as well as measurement interruptions due to lack of discharge. ■ Achieves excellent atmospheric pressure detection (compared to our products) - The Pirani gauge equipped in this device has improved stability and reproducibility near atmospheric pressure. *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications (Excerpt)】 ■ Input Voltage: DC +15 to 30V ■ Power Consumption: 2.4W ■ Set Point: 2 Contact Outputs (DC 30V 1A) ■ Input/Output Connector: D-sub 9-pin ■ Maximum Cable Length: Up to 300m (1mm²) ■ Operating Temperature Range: 5 to 55℃ ■ Storage Temperature Range: -20 to 70℃ (non-operating) ■ Sensor Model Name: CP2 ■ Dimensions (mm): 50×50×110 (NW25 joint specification) ■ Flange Shape: NW25, NW40, φ70 ICF *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Vapor deposition, sputtering, ion implantation, MBE ■ SEM, SIMS, AES, XPS, surface/gas/mass analysis ■ Annealing, melting, soldering, reflow, curing, electron beam welding ■ Accelerators, cyclotrons *For more details, please refer to the PDF document or feel free to contact us.
