Quadrupole mass spectrometry
Quadrupole mass spectrometry
We have a selection of residual gas monitors, process gas monitors, gas analysis systems, and more, tailored to meet our customers' measurement needs.
1～7 item / All 7 items
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Process Gas Monitor "M-080QA-HPM"
Achieves a wide range (1 to 80 amu) and high-sensitivity partial pressure measurement from the reached pressure of the vacuum chamber to the sputtering process pressure.
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Quadrupole Mass Spectrometer 'M-101/201QA-TDM'
Excellent basic performance that supports advanced analysis! Transducer type with a low gas emission ion source.
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Quadrupole mass spectrometer (high-speed measurement/high-sensitivity measurement)
Selectable from two types of ion sources! A quadrupole mass spectrometer capable of high-speed measurement and high-sensitivity measurement.
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Compact Gas Analysis System "D Series"
Easy measurement possible with computer control! Application technology products of quadrupole mass spectrometers.
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Compact Gas Analysis System "C Series"
The quadrupole mass spectrometer is available in four models! A space-saving and easy-to-use analysis system.
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Canon Anelva Corporation Company Profile
Contributing to the development of society! Providing high value-added products using ultra-vacuum technology.
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Custom-made gas analysis system
Contributing to research and development and quality control in manufacturing across diverse fields!
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