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Compact Gas Analysis System "C Series"

The quadrupole mass spectrometer is available in four models! A space-saving and easy-to-use analysis system.

The "C Series" is a gas analysis system that is designed to be simple and compact while accommodating a variety of gas analysis applications. By selecting the basic configuration (exhaust system + mass filter) and further choosing from a range of recommended options that are preset for various applications, it is possible to create a system configuration that suits the customer's needs. Despite its simplicity, it comes standard with basic interlock functions, allowing for safe use. 【Features】 ■ Flexible customization options ■ Can be installed in a compact space of W480mm x D500mm ■ Simple yet equipped with basic interlock functions as standard ■ Can be ordered as an exhaust unit for gas analysis without the need for an analysis tube *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://anelva.canon/business/component/mass_detai…

basic information

【Lineup】 ■M-070GA-CRFY ■M-101GA-CRFY ■M-101GA-CRMY ■M-201GA-CRMY *For more details, please refer to the PDF document or feel free to contact us.

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Applications/Examples of results

【Applications】 ■ Gas measurement for research and development purposes - In-furnace gas analysis and monitoring Vacuum heat treatment furnaces, vacuum carburizing furnaces, vacuum nitriding furnaces, metal melting furnaces, biogasification furnaces, electron beam melting furnaces (EB furnaces), wafer pull-up furnaces, etc. - Thermal desorption gas analysis - Catalytic reaction gas analysis ■ Gas analysis for process equipment applications - Process gas measurement for vacuum equipment - Residual gas measurement/leak detection for vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.

Quadrupole mass spectrometer

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